Operations
- Stepper
Exposure - Etching
- Diffusion
- Deposition
DN Solutions
Semiconductor
Solution Reference
Semiconductor Solutions
In the semiconductor industry, where extremely high precision and diverse and complex material machining are required to manufacture fine
structures, DN Solutions contributes to improving semiconductor quality and reliability by providing specialized solutions for each process.
- Customer First
DN Solutions always puts our customers first by providing them with unique solutions designed to produce the best results under all conditions.
- Trust from Semiconductor Equipment Industry
Annually, DN Solutions supplies more than 80%* of machine tools which are consumed in Korean semiconductor equipment manufacturing market
- Understanding of materials and manufacturing
DN Solutions offers optimal solutions for various materials from ceramics to difficult-to- machine materials such as stainless steels and titanium
- Thorough whole-process management
We provide the best full-process service, ranging from pre-order qualification to on-time delivery with continuous consideration of customer needs, and comprehensive post-delivery services
Semiconductor Solution Reference
Experience more efficient and optimized various lineup and workpieces by DN Solutions’ tailored solutions.
Vacuum Equipment :
DN Solutions provides various solutions for manufacturing vacuum equipment that require a very high level of precision.
Transfer Systems :
A transfer system is a system that precisely, quickly, and safely transfers wafers between various equipment and is one of the key elements of semiconductor manufacturing. DN Solutions provides various solutions for manufacturing Transfer System parts that require a very high level of precision.
Spraying/Cleaning/Heating
Oxidation
Operations
Polishing/
Metalization
Metalization
Workpiece Solution
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Chambers ChambersManufacturing Specialty- Heavy duty
- High Rigidity : In many cases, continuously operated for long periods
- Precision : To maintain Vacuum condition
- Material : Stainless Steel/Aluminum
NHM Series Characteristics- Horizontal machining center
- High rigidity design · Heavy duty (NHM) · High productivity (NHP)
DCM II Series Characteristics- Multi-fuctional bridge-type machining center
- High productivity · High rigidity design · Large table
High Rigidity Design
High Rigidity Bed Structure- NHM Series is designed for keeping high stability and durability intact through FEM technologies; the series ensures c ontinuous power ful c utting power with the structure applied with M- and W-type ribs
High Productivity
Adoption of ram spindle and saddle structure to support heavy-duty cutting- The highly rigid, square type box guideway ram has a cross section of 380 x 380mm (14.96x 14.96 inch), which is the biggest in its class. This ensures optimum heavy duty machining capability in both vertical and horizontal applications
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Flanges / Clamps Flanges / ClampsManufacturing Specialty- High precision
- Turning
- Flexibility for various shapes
- High rigidity: Difficult-to-machine materials
- Material: Stainless steels/ ceramics aluminum / Inconel
PUMA 2100Y Ⅱ Characteristics- Global standard horizontal turning center
- High speed · Heavy duty·High productivity
Mynx II Series Characteristics- Heavy duty vertical machining center
- High rigidity design · Heavy duty·High productivity
Cutting Performance
Cutting Performance PUMA GT2100 PUMA GT2600 PUMA GT3100 Cutting speed 270m/min 270m/min 280m/min Feedrate 0.3mm/rev 0.3mm/rev 0.3mm/rev Spindle speed 1131r/min 1131r/min 849r/min Cutting depth 3mm 3mm 3mm ID Turing Tool length- PUMA GT2100 : 3.5D
- PUMA GT2600 : 3.5D
- PUMA GT3100 : 4.0D
Improved Spindle Structure
Dual Contact Spindle- The system enables simultaneous dual contact using elastic deformation of the spindle and perfect gauge control
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Sealing / Bellows Sealing / BellowsManufacturing Specialty- High precision
- Flexibility for various shapes
- Materials : Stainless steels/ ceramics/ aluminum
DNM Series Characteristics- Global standard vertical machining center
- High speed · High productivity · Easy operation
Wide Machining Area
Table Size(AxB)- DNM 4500/L1000{1050} x 450 mm
- DNM 5700/L1300{1050} x 570 mm
- DNM 6700/L/XL1500{1600/2200} x 670 mm
Maximum load capacity- DNM 4500/4500L 600 kg
- DNM 5700/5700L 1000 kg
- DNM 6700/6700L/6700XL 1300 kg
Cutting PerformanceCutting Performance Chip removal rate (cm³/min) Spindle speed (r/min) Feedrate Face mill (Ø80mm)
Carbon steel (SM45C)527 1500 2700 
Face mill (Ø80mm)
Aluminium (AL6061)1901 1500 5490 
End mill (Ø30mm)
Carbon steel (SM45C)48 222 107 
U-Drill (Ø50mm)
Carbon steel (SM45C)501 1500 155 
Tap Carbon steel (SM45C) Tap size (mm (inch)) M 36 x P 4.0 221 884 
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Vacuum Pump Rotor Shafts Vacuum Pump Rotor ShaftsManufacturing Specialty- High hardness
- High precision
- Eccentric machining
- Material: Metal
NHM Series Characteristics- Highly capable horizontal machining center
- High rigidity· Heavy duty · Application engineering
Application Engineering
Servo-driven ATCtitle Cutting Capacity(Unit : mm) 
Model Max.tool diameter x Max.tool length Tool change time(tool weight of less than 12 kg (26.5 lb)) BT / CT / DIN HSK Model Tool to tool Chip to chip NHM 5000 320 x 530 320 x 600 NHM 5000 2s 6.4s NHM 6300 320 x 630 320 x 700 NHM 6300 6.7s NHM 8000 320 x 630 320 x 700 NHM 8000 8s - The ATC is capable of handling weight from 25kg to 30kg at high speed using a servo motor, and fast tool indexing and spindle positioning.
Heavy duty
Powerful Spindle- Designed to minimize vibration and thermal error while offering rapid acceleration and deceleration, the spindle guarantees excellent cutting performance from steel to nonferrous metal parts.
Spindle Cooling System- The spindle temperature Is kept uniform by the Cooling system.
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Quartz Boats / Rings Quartz Boats / RingsManufacturing Specialty- High brittleness: fragility
- Needs heat treatment between machining operations
- Mainly small hole machining
- Material: Quartz
DNM Series Characteristics- Global standard vertical machining center
- High speed·High productivity·Highprecision
Travel Distance
Travel distance (X x Y x Z axis)- DNM 4500/L800{910} x 510 mm
- DNM 5700/L1050{1300} x 570 x 510 mm
- DNM 6700/L/XL1300{1500/2100} x 670 x 625 mm
Spindle
Max.spindle speed- 8000/12000/15000 r/min
Max.spindle motor power- 18.5 kW
Max.spindle motor torque- 117.8 N·m {8000/12000/15000 r/min}
- 286 N·m {8000 r/min high torque version}
-
Quartz Rings Quartz RingsManufacturing Specialty- High precision grinding solution
- Max. Dia Ø300~550mm (Ø11.8~21.7 inch) range (for 300mm(11.8 inch) size wafer chamber)
- Disposal of fine chips and sludge
- Materials: Quartz, SiC, ceramics
XG 600/800 with ATC Characteristics- Grinding machine for quartz and ceramics material
- High precision grinding · Easy sludge cleaning · C-axis function (hole machining)
High Precision Grinding
Grinding- ① O.D. Groove Grinding
- ② O.D. End face Grinding
- ③ Face Grinding
- ④ I.D. Taper Grinding
- ⑤ I.D. Curve Grinding
- ⑥ I.D. Grinding
- ⑦ I.D. Groove Grinding
C-axis Function
Hole Machining (C-axis control)- Grinding of holes and grooves on the front face and OD of the workpiece can now be achieved thanks to the addition of a C axis function on the main spindle.
- ① Semicircular groove cutting
- ② ③ Hole machining ④ keyway cutting
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Robot Arms Robot ArmsManufacturing Specialty- High brittleness: Fragility
- Flexibility for various shapes
- Material : Various Ceramics
DNM Series Characteristics- Global Standard Vertical Machining Center
- High Speed·High Productivity·Easy Operation
Travel DistanceTravel distance (X x Y x Z axis)- DNM 4500/L800{910} x 510 mm
- DNM 5700/L1050{1300} x 570 x 510 mm
- DNM 6700/L/XL1300{1500/2100} x 670 x 625 mm
SpindleMax.spindle speed- 8000/12000/15000 r/min
Max.spindle motor power- 18.5 kW
Max.spindle motor torque- 117.8 N·m {8000/12000/15000 r/min}
- 286 N·m {8000 r/min high torque version}
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Heaters HeatersManufacturing Specialty- High hardness
- High precision
- Solution for fine chip scattering
- Material: AIN
VX 6500C Characteristics- Vertical machinining center for ceramic machining
- High speed·High precision· Protection from fine chips
Basic Structure
Max.spindle speed- 12000{20000/30000/40000} r/min
Travel distance- Xaxis 1050mm, Yaxis 650mm, Xaxis 550mm
Rapid traverse rate- Xaxis 30 m/mim, Yaxis 30 m/mim, Xaxis 30 m/mim
High Precision
Realizes high-quality, high-precision machining with smoothing thermal displacement compensation of the spindle and structure.
Compensation of static displacement of spindle- Compensates tool position caused by expansion of the spindle shaft at high speed.
Structure thermal displacement compensation- Compensates irregular deflection or expansion of the structure due to ambient temperature using multiple temperature sensors.
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Shower heads Shower headsManufacturing Specialty- High precision
- Repeat positioning accuracy High speed spindle for hole roughness and protection from fine chips
- Material: Si
T 4000HS Characteristics- High speed tapping center
- High speed / High productivity·Compact·Fine hole machining
High speed machining solution
High speed machining solution- 24000 r/min
New spindle cartridge Oil lublication for high reliability and endurance Ultra-fine cutting : FANUC 31i- Rapid Traverse 48 m/min
High Precision
After thermal error compensation*- *T 4000, 18000 r/min, In-house measurement
Spindle Thermal Error Compensation System (standard)*- Thermal error of the spindle is calculated with the spindle temperature feedback and automatically compensated to maintain the highest level of work accuracy.
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Shower heads Shower headsManufacturing Specialty- High hardness
- High Precision
- Solution for Fine chip Scatttering
- Material : Aluminum
MP 6500 Characteristics- High-precision, High-speed vertical machining center
- Highrigidity · High precision · Protection from fine chips
Bridge Type Structure
Thermal analysis of the symmetrical structure proves that this is the optimal solution for high precision machining of mild materials.
Travel distance- Xaxis 1100 mm, Yaxis 650 mm, Xaxis 550 mm
Recommended Option- Through Spindle Coolant
- Linear scale
- Oil Lubrication
High-rigidity, High-precision Spindle
Adopting a new constant preloading structure, improved spindle rigidity in low-speed range and achieved long spindle life.
Max. spindle speed- 20000 {15000/30000/40000} r/min
Spindle Cooling System- 22/11 kW
스핀들 종류 및 공구 규격title 20000 r/min 15000 r/min 30000 r/min 30000 r/min spindle motor power (kW) 22/11 37/22 18.5/13 5.5/3.7 공구 규격 BBT 40 BBT 40 HSK-F63 HSK-E40 -
Si Rings Si RingsManufacturing Specialty- High precision
- Solution for fine chip scatttering
- Rotary table
- Materials: Si, ceramics, quartz
DNM Series Characteristics- Global Standard Vertical Machining Center
- High speed·High productivity · Protection from fine chips
SpindleMax.spindle speed- 8000/12000/15000 r/min
Max.spindle motor power- 18.5 kW
Max.spindle motor torque- 117.8 N·m {8000/12000/15000 r/min}
- 286 N·m {8000 r/min high torque version}
Rapid traverse rate
Rapid traverse rate (X / Y / Z-Yaxis)- DNM 4500/5700/6700/6700L36/36/30 m/min
- DNM 6700XL30/30/30 m/min
Inspection
Packaging
- Wafer
Cutting - Wire
- Molding
- Marking
- Molding
Cutting
Inspection
Workpiece Solution
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Probe Cards Probe CardsManufacturing Specialty- Solution for ceramics
- Laser machining for smaller holes
- Material: Ceramics
Mynx II Series Characteristics- Heavy Duty vertical machining Center
- High Speed·Compact·High Productivity
How to machine
- By Machine Tools
- By Laser
Small hole machiningtitle Chip removal rate (cm³/min) Spindle speed (r/min) Feedrate Face mill (ø80 mm, number of flutes: 6)
Carbon steel (SM45C)374.4 500 1950 
Drill (ø50 mm)
Carbon steel (SM45C)265.07 500 135 
Tap Carbon steel (SM45C) Tap size (mm (inch)) M 36 x P 4.0 265 1060 
- ISO #40 : Result of cutting test on Mynx 5400Ⅱ
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Test Sockets Test SocketsManufacturing Specialty- Small parts
- High precision
- Repeat positioning accuracy
- High speed spindle for hole roughness
- Material: Engineered plastic/ PEEK
T 4000HS Characteristics- High Speed Tapping Center
- High speed/ High productivity·Compact·Fine
hole machining
High speed machining solutionHigh speed machining solution- 24000 r/min
New spindle cartridge Oil lublication for high reliability and endurance Ultra-fine cutting : FANUC 31i- Rapid Traverse 48 m/min
Productivity improvement
-
Molding Dies Molding DiesManufacturing Specialty- Ultra high precision
- Fine hole machining: Molding liquid must be equally injected
- Material: Metal
DNM Series Characteristics- Global Standard Vertical Machining Center
- High Speed·High Productivity·High Accuracy
Wide Machining AreaTable Size(AxB)- DNM 4500/L1000{1050} x 450 mm
- DNM 5700/L1300{1050} x 570 mm
- DNM 6700/L/XL1500{1600/2200} x 670 mm
Maximum load capacity- DNM 4500/4500L 600 kg
- DNM 5700/5700L 1000 kg
- DNM 6700/6700L/6700XL 1300 kg
Various SpindleMax.spindle speed- 8000/12000/15000 r/min
Max.spindle motor power- 18.5 kW
Max.spindle motor torque- 117.8 N·m {8000/12000/15000 r/min}
- 286 N·m {8000 r/min high torque version}
-
Probe Card Probe CardManufacturing Specialty- Large part machining
- Material: Metal
BM series Characteristics- Double column machining center / Horizontal boring machine
- High rigidity design · High productivity · Large size table
DBC series Characteristics- Double column machining center / Horizontal boring machine
- High rigidity design · High productivity · Large size table
For large parts machining
A. Stroke (X x Yaxis)- BM 1530 : 3000 x 1550 mm
- BM 2035 : 3500 x 2050 mm
- BM 2740 : 4000 x 2700 mm
- BM 1530 & BM2035 & BM2740 :
Z-Yaxis 800mm
B. X/Y/Z Stroke- 4000 / 2500/ 2000 mm
Max. Workpiece diameter(without Splash guard)- DBC 130Ⅱ / 250Ⅱ Ø3900 mm
- DBC 130LⅡ / DBC 160 / L / 250 LⅡ
Ø4800 mm
Korean Semiconductor Industry and DN Solutions
DN Solutions is helping the Korean semiconductor industry contribute to the world by providing the technology, knowledge and solutions required by the
Korean IT industry.
Korea's Semiconductor Industry Korean Semiconductor Industry in the World
Semiconductor Solution Semiconductor industry
in Korea
in Korea
Korean Semiconductor Industry
in 2018
in 2018
DRAM 73.2Billion USD
NAND Flash 28.9Billion USD
Korean Semiconductor
Equipment Industry in 2018
Equipment Industry in 2018
Revenue 17.7Billion USD
- 27.4% Market Share of DRAM
in 2018 - 45.6% Market Share of NAND Flash
in 2018 - 74.5% Market Share of Semiconductor
Equipment Industry in 2018
IT Industry of DN Solutions Impact of DN Solutions in the Korean IT industry
- 8000EA
Supplied to Korean IT
industry for
2 years - 80%
Market share in Korean
IT Industry - 90%
Companies using parts
which is manufactured by
DN Solutions machine
Among the Top20
