- Stepper
Exposure - Etching
- Diffusion
- Deposition
DN Solutions
Semiconductor
Solution Reference
Semiconductor Solutions
In the semiconductor industry, where extremely high precision and diverse and complex material machining are required to manufacture fine
structures, DN Solutions contributes to improving semiconductor quality and reliability by providing specialized solutions for each process.
- Customer First
DN Solutions always puts our customers first by providing them with unique solutions designed to produce the best results under all conditions.
- Trust from Semiconductor Equipment Industry
Annually, DN Solutions supplies more than 80%* of machine tools which are consumed in Korean semiconductor equipment manufacturing market
- Understanding of materials and manufacturing
DN Solutions offers optimal solutions for various materials from ceramics to difficult-to- machine materials such as stainless steels and titanium
- Thorough whole-process management
We provide the best full-process service, ranging from pre-order qualification to on-time delivery with continuous consideration of customer needs, and comprehensive post-delivery services
Semiconductor Solution Reference
Experience more efficient and optimized various lineup and workpieces by DN Solutions’ tailored solutions.
Vacuum Equipment :
DN Solutions provides various solutions for manufacturing vacuum equipment that require a very high level of precision.
Transfer Systems :
A transfer system is a system that precisely, quickly, and safely transfers wafers between various equipment and is one of the key elements of semiconductor manufacturing. DN Solutions provides various solutions for manufacturing Transfer System parts that require a very high level of precision.
Spraying/Cleaning/Heating
Metalization
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ChambersManufacturing Specialty
- Heavy duty
- High Rigidity : In many cases, continuously operated for long periods
- Precision : To maintain Vacuum condition
- Material : Stainless Steel/Aluminum
High Rigidity DesignHigh Rigidity Bed Structure- NHM Series is designed for keeping high stability and durability intact through FEM technologies; the series ensures c ontinuous power ful c utting power with the structure applied with M- and W-type ribs
High ProductivityAdoption of ram spindle and saddle structure to support heavy-duty cutting- The highly rigid, square type box guideway ram has a cross section of 380 x 380mm (14.96x 14.96 inch), which is the biggest in its class. This ensures optimum heavy duty machining capability in both vertical and horizontal applications
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Flanges / ClampsManufacturing Specialty
- High precision
- Turning
- Flexibility for various shapes
- High rigidity: Difficult-to-machine materials
- Material: Stainless steels/ ceramics aluminum / Inconel
Cutting PerformanceCutting Performance PUMA GT2100 PUMA GT2600 PUMA GT3100 Cutting speed 270m/min 270m/min 280m/min Feedrate 0.3mm/rev 0.3mm/rev 0.3mm/rev Spindle speed 1131r/min 1131r/min 849r/min Cutting depth 3mm 3mm 3mm ID Turing Tool length- PUMA GT2100 : 3.5D
- PUMA GT2600 : 3.5D
- PUMA GT3100 : 4.0D
Improved Spindle StructureDual Contact Spindle- The system enables simultaneous dual contact using elastic deformation of the spindle and perfect gauge control
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Sealing / BellowsManufacturing Specialty
- High precision
- Flexibility for various shapes
- Materials : Stainless steels/ ceramics/ aluminum
Wide Machining AreaTable Size(AxB)- DNM 4500/L1000{1050} x 450 mm
- DNM 5700/L1300{1050} x 570 mm
- DNM 6700/L/XL1500{1600/2200} x 670 mm
Maximum load capacity- DNM 4500/4500L 600 kg
- DNM 5700/5700L 1000 kg
- DNM 6700/6700L/6700XL 1300 kg
Cutting PerformanceCutting Performance Chip removal rate (cm³/min) Spindle speed (r/min) Feedrate Face mill (Ø80mm)
Carbon steel (SM45C)527 1500 2700 Face mill (Ø80mm)
Aluminium (AL6061)1901 1500 5490 End mill (Ø30mm)
Carbon steel (SM45C)48 222 107 U-Drill (Ø50mm)
Carbon steel (SM45C)501 1500 155 Tap Carbon steel (SM45C) Tap size (mm (inch)) M 36 x P 4.0 221 884 -
Vacuum Pump Rotor ShaftsManufacturing Specialty
- High hardness
- High precision
- Eccentric machining
- Material: Metal
Application Engineeringtitle Cutting Capacity(Unit : mm) Model Max.tool diameter x Max.tool length Tool change time(tool weight of less than 12 kg (26.5 lb)) BT / CT / DIN HSK Model Tool to tool Chip to chip NHM 5000 320 x 530 320 x 600 NHM 5000 2s 6.4s NHM 6300 320 x 630 320 x 700 NHM 6300 6.7s NHM 8000 320 x 630 320 x 700 NHM 8000 8s - The ATC is capable of handling weight from 25kg to 30kg at high speed using a servo motor, and fast tool indexing and spindle positioning.
Heavy dutyPowerful Spindle- Designed to minimize vibration and thermal error while offering rapid acceleration and deceleration, the spindle guarantees excellent cutting performance from steel to nonferrous metal parts.
Spindle Cooling System- The spindle temperature Is kept uniform by the Cooling system.
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Quartz Boats / RingsManufacturing Specialty
- High brittleness: fragility
- Needs heat treatment between machining operations
- Mainly small hole machining
- Material: Quartz
Travel DistanceTravel distance (X x Y x Z axis)- DNM 4500/L800{910} x 510 mm
- DNM 5700/L1050{1300} x 570 x 510 mm
- DNM 6700/L/XL1300{1500/2100} x 670 x 625 mm
SpindleMax.spindle speed- 8000/12000/15000 r/min
Max.spindle motor power- 18.5 kW
Max.spindle motor torque- 117.8 N·m {8000/12000/15000 r/min}
- 286 N·m {8000 r/min high torque version}
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Quartz RingsManufacturing Specialty
- High precision grinding solution
- Max. Dia Ø300~550mm (Ø11.8~21.7 inch) range (for 300mm(11.8 inch) size wafer chamber)
- Disposal of fine chips and sludge
- Materials: Quartz, SiC, ceramics
High Precision GrindingGrinding- ① O.D. Groove Grinding
- ② O.D. End face Grinding
- ③ Face Grinding
- ④ I.D. Taper Grinding
- ⑤ I.D. Curve Grinding
- ⑥ I.D. Grinding
- ⑦ I.D. Groove Grinding
C-axis FunctionHole Machining (C-axis control)- Grinding of holes and grooves on the front face and OD of the workpiece can now be achieved thanks to the addition of a C axis function on the main spindle.
- ① Semicircular groove cutting
- ② ③ Hole machining ④ keyway cutting
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Robot ArmsManufacturing Specialty
- High brittleness: Fragility
- Flexibility for various shapes
- Material : Various Ceramics
Travel DistanceTravel distance (X x Y x Z axis)- DNM 4500/L800{910} x 510 mm
- DNM 5700/L1050{1300} x 570 x 510 mm
- DNM 6700/L/XL1300{1500/2100} x 670 x 625 mm
SpindleMax.spindle speed- 8000/12000/15000 r/min
Max.spindle motor power- 18.5 kW
Max.spindle motor torque- 117.8 N·m {8000/12000/15000 r/min}
- 286 N·m {8000 r/min high torque version}
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HeatersManufacturing Specialty
- High hardness
- High precision
- Solution for fine chip scattering
- Material: AIN
Basic StructureMax.spindle speed- 12000{20000/30000/40000} r/min
Travel distance- Xaxis 1050mm, Yaxis 650mm, Xaxis 550mm
Rapid traverse rate- Xaxis 30 m/mim, Yaxis 30 m/mim, Xaxis 30 m/mim
High PrecisionRealizes high-quality, high-precision machining with smoothing thermal displacement compensation of the spindle and structure.
Compensation of static displacement of spindle- Compensates tool position caused by expansion of the spindle shaft at high speed.
Structure thermal displacement compensation- Compensates irregular deflection or expansion of the structure due to ambient temperature using multiple temperature sensors.
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Shower headsManufacturing Specialty
- High precision
- Repeat positioning accuracy High speed spindle for hole roughness and protection from fine chips
- Material: Si
High speed machining solutionHigh speed machining solution- 24000 r/min
New spindle cartridge Oil lublication for high reliability and endurance Ultra-fine cutting : FANUC 31i- Rapid Traverse 48 m/min
High PrecisionAfter thermal error compensation*- *T 4000, 18000 r/min, In-house measurement
Spindle Thermal Error Compensation System (standard)*- Thermal error of the spindle is calculated with the spindle temperature feedback and automatically compensated to maintain the highest level of work accuracy.
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Shower headsManufacturing Specialty
- High hardness
- High Precision
- Solution for Fine chip Scatttering
- Material : Aluminum
Bridge Type StructureThermal analysis of the symmetrical structure proves that this is the optimal solution for high precision machining of mild materials.
Travel distance- Xaxis 1100 mm, Yaxis 650 mm, Xaxis 550 mm
Recommended Option- Through Spindle Coolant
- Linear scale
- Oil Lubrication
High-rigidity, High-precision SpindleAdopting a new constant preloading structure, improved spindle rigidity in low-speed range and achieved long spindle life.
Max. spindle speed- 20000 {15000/30000/40000} r/min
Spindle Cooling System- 22/11 kW
스핀들 종류 및 공구 규격title 20000 r/min 15000 r/min 30000 r/min 30000 r/min spindle motor power (kW) 22/11 37/22 18.5/13 5.5/3.7 공구 규격 BBT 40 BBT 40 HSK-F63 HSK-E40 -
Si RingsManufacturing Specialty
- High precision
- Solution for fine chip scatttering
- Rotary table
- Materials: Si, ceramics, quartz
SpindleMax.spindle speed- 8000/12000/15000 r/min
Max.spindle motor power- 18.5 kW
Max.spindle motor torque- 117.8 N·m {8000/12000/15000 r/min}
- 286 N·m {8000 r/min high torque version}
Rapid traverse rateRapid traverse rate (X / Y / Z-Yaxis)- DNM 4500/5700/6700/6700L36/36/30 m/min
- DNM 6700XL30/30/30 m/min
- Wafer
Cutting - Wire
- Molding
- Marking
- Molding
Cutting
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Probe CardsManufacturing Specialty
- Solution for ceramics
- Laser machining for smaller holes
- Material: Ceramics
How to machine- By Machine Tools
- By Laser
Small hole machiningtitle Chip removal rate (cm³/min) Spindle speed (r/min) Feedrate Face mill (ø80 mm, number of flutes: 6)
Carbon steel (SM45C)374.4 500 1950 Drill (ø50 mm)
Carbon steel (SM45C)265.07 500 135 Tap Carbon steel (SM45C) Tap size (mm (inch)) M 36 x P 4.0 265 1060 - ISO #40 : Result of cutting test on Mynx 5400Ⅱ
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Test SocketsManufacturing Specialty
- Small parts
- High precision
- Repeat positioning accuracy
- High speed spindle for hole roughness
- Material: Engineered plastic/ PEEK
High speed machining solutionHigh speed machining solution- 24000 r/min
New spindle cartridge Oil lublication for high reliability and endurance Ultra-fine cutting : FANUC 31i- Rapid Traverse 48 m/min
Productivity improvement
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Molding DiesManufacturing Specialty
- Ultra high precision
- Fine hole machining: Molding liquid must be equally injected
- Material: Metal
Wide Machining AreaTable Size(AxB)- DNM 4500/L1000{1050} x 450 mm
- DNM 5700/L1300{1050} x 570 mm
- DNM 6700/L/XL1500{1600/2200} x 670 mm
Maximum load capacity- DNM 4500/4500L 600 kg
- DNM 5700/5700L 1000 kg
- DNM 6700/6700L/6700XL 1300 kg
Various SpindleMax.spindle speed- 8000/12000/15000 r/min
Max.spindle motor power- 18.5 kW
Max.spindle motor torque- 117.8 N·m {8000/12000/15000 r/min}
- 286 N·m {8000 r/min high torque version}
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Probe CardManufacturing Specialty
- Large part machining
- Material: Metal
For large parts machiningA. Stroke (X x Yaxis)- BM 1530 : 3000 x 1550 mm
- BM 2035 : 3500 x 2050 mm
- BM 2740 : 4000 x 2700 mm
- BM 1530 & BM2035 & BM2740 :
Z-Yaxis 800mm
B. X/Y/Z Stroke- 4000 / 2500/ 2000 mm
Max. Workpiece diameter(without Splash guard)- DBC 130Ⅱ / 250Ⅱ Ø3900 mm
- DBC 130LⅡ / DBC 160 / L / 250 LⅡ
Ø4800 mm
Korean Semiconductor Industry and DN Solutions
DN Solutions is helping the Korean semiconductor industry contribute to the world by providing the technology, knowledge and solutions required by the
Korean IT industry.
in Korea
in 2018
Equipment Industry in 2018
- 27.4% Market Share of DRAM
in 2018 - 45.6% Market Share of NAND Flash
in 2018 - 74.5% Market Share of Semiconductor
Equipment Industry in 2018
- 8000EA
Supplied to Korean IT
industry for
2 years - 80%
Market share in Korean
IT Industry - 90%
Companies using parts
which is manufactured by
DN Solutions machine
Among the Top20